AP Plasma Systems

The AP-1000 plasma system meets the rigorous demands of 24-hour operation in high-performance manufacturing environments. The system delivers uniform plasma treatment with unmatched reliability, safety, and ease of operation.

The AP-1000 system provides the following:
• A compact enclosure that contains the pump, chamber, control electronics, and 13.56 MHz RF generator with impedance matching for unparalleled process repeatability.
• Superior durability through a plasma chamber constructed of 11-gauge stainless steel with aluminum fixtures.
• An intuitive touchscreen control panel for real-time process monitoring.
• Multiple removable and adjustable shelves to accommodate a range of part carriers, including magazines (up to 12), trays, wafers, and Auer® boats.
• A proprietary software control system that generates process and production data for statistical process control.
• Front access to all interior components and the pump is positioned on rollers for easy removal.
• Supports a range of process gases, including argon, nitrogen, and helium, is equipped with three mass flow controllers, and features vertically positioned slotted magazines that hold a
minimum of 20 lead frames.